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Proceedings Paper

Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range
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Paper Abstract

High reflecting low-stress optical coatings for the next-generation of micro mechanical mirrors have been developed. The optimized metal systems are applicable from VUV and DUV down to the UV and VIS spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors. This optimized metal designs enable to reconcile high optical performances with adequate mechanical properties and convenient CMOS compatibility. Currently, micro-mirror arrays with enhanced highly reflective coatings for DUV (λ = 193 nm) and VUV (λ = 157 nm) exist as prototypes.

Paper Details

Date Published: 22 January 2005
PDF: 9 pages
Proc. SPIE 5721, MOEMS Display and Imaging Systems III, (22 January 2005); doi: 10.1117/12.590522
Show Author Affiliations
Thilo Sandner, Fraunhofer Institute for Photonic Microsystems (Germany)
Jan Uwe Schmidt, Fraunhofer Institute for Photonic Microsystems (Germany)
Harald Schenk, Fraunhofer Institute for Photonic Microsystems (Germany)
Hubert Lakner, Fraunhofer Institute for Photonic Microsystems (Germany)
Alexandre Gatto, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Minghong Yang, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Norbert Kaiser, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Stefan Braun, Fraunhofer Institute for Material and Beam Technology (Germany)
Thomas Foltyn, Fraunhofer Institute for Material and Beam Technology (Germany)
Andreas Leson, Fraunhofer Institute for Material and Beam Technology (Germany)


Published in SPIE Proceedings Vol. 5721:
MOEMS Display and Imaging Systems III
Hakan Urey; David L. Dickensheets, Editor(s)

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