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Proceedings Paper

Micromechanical scanning mirrors with highly reflective NIR coatings for high-power applications
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Paper Abstract

This paper addresses different highly reflective optical coatings on micro scanning mirrors (MSM) for applications in the NIR-spectral region to enable new applications like laser marking and material treatment at high optical power density. In the case of MSM with an unprotected Al coating, the absorption limits the maximal power density because of induced heating. The damage threshold for unprotected Al coatings was investigated. In addition highly reflective enhanced metallic and dielectric multilayer coatings for the NIR have been developed and characterized. These coatings resolve the problems of unprotected aluminum coatings related to NIR absorption and the resulting limitation of applicable laser power density. The coatings ensure a high reflectance even in corrosive environments. Enhanced metallic broadband reflectors reach a reflectivity of 98.7% at 1064 nm whereas narrow-band dielectric multilayer coatings reach a reflectivity of 99.7% at 1064 nm.

Paper Details

Date Published: 22 January 2005
PDF: 9 pages
Proc. SPIE 5721, MOEMS Display and Imaging Systems III, (22 January 2005); doi: 10.1117/12.590448
Show Author Affiliations
Thilo Sandner, Fraunhofer Institute for Photonic Microsystems (Germany)
Jan Uwe Schmidt, Fraunhofer Institute for Photonic Microsystems (Germany)
Harald Schenk, Fraunhofer Institute for Photonic Microsystems (Germany)
Hubert Lakner, Fraunhofer Institute for Photonic Microsystems (Germany)
Stefan Braun, Fraunhofer Institute for Material and Beam Technology (Germany)
Thomas Foltyn, Fraunhofer Institute for Material and Beam Technology (Germany)
Andreas Leson, Fraunhofer Institute for Material and Beam Technology (Germany)
Alexandre Gatto, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Minghong Yang, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Norbert Kaiser, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 5721:
MOEMS Display and Imaging Systems III
Hakan Urey; David L. Dickensheets, Editor(s)

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