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Proceedings Paper

Multilayer coating method for x-ray reflectivity enhancement of polysilicon micro-mirrors at 1.54-Å wavelength
Author(s): Marie K. Tripp; Francois Fabreguette; Cari F. Herrmann; Steven M. George; Victor M. Bright
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Paper Abstract

A poly-silicon piston micro-mirror array, which has been enhanced with a multilayer coating to exhibit special reflective properties at Cu Kα emission line of 1.54 Å is presented. The micro-mirror array is fabricated using the MEMSCAP PolyMUMPs process and packaged in a ceramic package. The packaged array is coated using atomic layer deposition with an Al2O3/W multilayer. The first Al2O3 layer is thicker than for a normal bilayer pair and prevents the mirror coating from creating an electrical short. This device was tested before and after coating. The snap-down voltage was reduced by half, but qualitatively the mechanical motion remained similar. The fabrication process presented for the Cu Kα wavelength at 1.54 Å can be easily adapted to other optical MEMS and for other wavelengths.

Paper Details

Date Published: 22 January 2005
PDF: 11 pages
Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); doi: 10.1117/12.590429
Show Author Affiliations
Marie K. Tripp, Univ. of Colorado/Boulder (United States)
Francois Fabreguette, Univ. of Colorado/Boulder (United States)
Cari F. Herrmann, Univ. of Colorado/Boulder (United States)
Steven M. George, Univ. of Colorado/Boulder (United States)
Victor M. Bright, Univ. of Colorado/Boulder (United States)

Published in SPIE Proceedings Vol. 5720:
Micromachining Technology for Micro-Optics and Nano-Optics III
Eric G. Johnson; Gregory P. Nordin; Thomas J. Suleski, Editor(s)

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