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Proceedings Paper

Fabrication of III-V/polymer optical nanowires and nanogratings for nanophotonic devices
Author(s): Denis Lauvernier; Jean-Pierre Vilcot; Didier Decoster
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Paper Abstract

One of the most important concerns in photonic integrated circuits is the reduction of the propagation path for optical interconnections leading so to a size decrease of active and passive components such as filters or multichannel wavelength (de)multiplexers. In this aim, it is necessary to use monomode optical waveguides with a high optical confinement via a strong index contrast. So the structures reported here consist in 300 nm-wide GaAs nano-wires and nano-gratings inserted in a polymer matrix. The technological process we present hereby allows fabricating symmetric waveguides with square cross-section.

Paper Details

Date Published: 25 March 2005
PDF: 11 pages
Proc. SPIE 5732, Quantum Sensing and Nanophotonic Devices II, (25 March 2005); doi: 10.1117/12.590418
Show Author Affiliations
Denis Lauvernier, Institut d'Electronique, de Microelectronique et de Nanotechnologie, CNRS, USTL (France)
Jean-Pierre Vilcot, Institut d'Electronique, de Microelectronique et de Nanotechnologie, CNRS, USTL (France)
Didier Decoster, Institut d'Electronique, de Microelectronique et de Nanotechnologie, CNRS, USTL (France)


Published in SPIE Proceedings Vol. 5732:
Quantum Sensing and Nanophotonic Devices II
Manijeh Razeghi; Gail J. Brown, Editor(s)

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