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Proceedings Paper

Time-resolved and spectrally resolved 5D multiphoton microscopy for analysis and nanoprocessing of materials
Author(s): Karsten Konig; Iris Riemann; Herbert Schuck; Daniel Sauer; Thomas Velten; Ronan Le Harzic
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Paper Abstract

For the first time, sub-100 nm nanostructuring as well as five-dimensional (5D) multiphoton analysis with submicron spatial resolution, 270 ps temporal resolution and 10 nm spectral resolution have been performed on metal films, semiconductors, polymers and biological tissues using near infrared, 80/90 MHz femtosecond laser pulses at <3nJ pulse energy. A compact (65x62x48 cm3) multiport laser scanning microscope FemtoCut (JenLab GmbH) equipped with fast detectors for time-correlated single photon counting and a Sagnac interferometer for spectral imaging as well as the ZEISS laser scanning microscope LSM 510 Meta-NLO have been employed. Laser excitation radiation was provided by a tuneable turn-key, one-box Chameleon as well as a MaiTai Ti:sapphire laser oscillator. We were able to perform precise multiphoton nanopatterning of gold films, photoresists and polymers with submicron (cut) sizes. Interestingly, sub-80 nm laser-induced periodic surface structures (LIPPS) have been created in silicon wafers and used to produce nanostructured 2D silicon arrays.

Paper Details

Date Published: 12 April 2005
PDF: 8 pages
Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); doi: 10.1117/12.590400
Show Author Affiliations
Karsten Konig, Fraunhofer Institute for Biomedical Technology (Germany)
Iris Riemann, Fraunhofer Institute for Biomedical Technology (Germany)
Herbert Schuck, Fraunhofer Institute for Biomedical Technology (Germany)
Daniel Sauer, Fraunhofer Institute for Biomedical Technology (Germany)
Thomas Velten, Fraunhofer Institute for Biomedical Technology (Germany)
Ronan Le Harzic, JenLab GmbH (Germany)


Published in SPIE Proceedings Vol. 5713:
Photon Processing in Microelectronics and Photonics IV
Jim Fieret; David B. Geohegan; Friedrich G. Bachmann; Willem Hoving; Frank Träger; Peter R. Herman; Jan J. Dubowski; Tatsuo Okada; Kunihiko Washio; Yongfeng Lu; Craig B. Arnold, Editor(s)

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