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Proceedings Paper

Fabrication of 3D microstructure and analysis of voxel generation by ultrafast-laser-induced two-photon absorption
Author(s): Shin Wook Yi; Seong Ku Lee; Mi Jung Cho; Hong Jin Kong; Dong-Yol Yang; Sang-hu Park; Tae-woo Lim; Ran Hee Kim; Kwang-Sup Lee
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Paper Abstract

Multi-photon absorption phenomena induced by ultra fast laser have been considered for many applications of microfabrications such as metal ablation, glass etching and photopolymerization. Among the applications, the photopolymerization by two-photon absorption (TPA) has been regarded as a new microfabricating method. It is possible to be used in photo mask correcting, diffractive optical element and micro machining. The TPA photopolymerization is made possible to fabricate a complicated three dimensional (3D) micro-structure which the conventional photomask technology has not been able to make. In fact, the shape of the voxel (volume pixel: a unit structure of TPA fabrication) is an important factor which could affect the microfabrication process. In this paper, we have reported that 3D micro-structures were fabricated and the generation of voxel shape was analyzed for various optical conditions.

Paper Details

Date Published: 22 January 2005
PDF: 12 pages
Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, (22 January 2005); doi: 10.1117/12.590381
Show Author Affiliations
Shin Wook Yi, Korea Advanced Institute of Science and Technology (South Korea)
Seong Ku Lee, Korea Advanced Institute of Science and Technology (South Korea)
Mi Jung Cho, Korea Advanced Institute of Science and Technology (South Korea)
Hong Jin Kong, Korea Advanced Institute of Science and Technology (South Korea)
Dong-Yol Yang, Korea Advanced Institute of Science and Technology (South Korea)
Sang-hu Park, Korea Advanced Institute of Science and Technology (South Korea)
Tae-woo Lim, Korea Advanced Institute of Science and Technology (South Korea)
Ran Hee Kim, Hannam Univ. (South Korea)
Kwang-Sup Lee, Hannam Univ. (South Korea)


Published in SPIE Proceedings Vol. 5715:
Micromachining and Microfabrication Process Technology X
Mary-Ann Maher; Harold D. Stewart, Editor(s)

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