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Proceedings Paper

MEMS fabrication process management environment
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Paper Abstract

New microfabrication technologies in the MEMS domain require novel approaches in computer aided design. Process issues in these technologies affecting the design are becoming increasingly important and Process information held in static design rule sets will be no longer sufficient. This paper describes the methodology and the implementation of a process management system that supports the designer in configuring application specific process flows with predictable properties.

Paper Details

Date Published: 22 January 2005
PDF: 11 pages
Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, (22 January 2005); doi: 10.1117/12.590276
Show Author Affiliations
Jens Popp, Univ. of Siegen (Germany)
Thilo Schmidt, Univ. of Siegen (Germany)
Andreas Wagener, Univ. of Siegen (Germany)
Kai Hahn, Univ. of Siegen (Germany)


Published in SPIE Proceedings Vol. 5715:
Micromachining and Microfabrication Process Technology X
Mary-Ann Maher; Harold D. Stewart, Editor(s)

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