Share Email Print
cover

Proceedings Paper

Large silicon micromirror modeling and fabrication
Author(s): Alexandre Marchese; Henri Camon; Christian Ganibal
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Electrostatic micromirrors are yet a well-known topic in the world of MOEMS. But in some specific cases, the mirror dimensions should have to be extended in order to be able to switch beams of a larger diameter. In other words, the convergence in dimensions between electronic technologies and classical machining in the range of hundreds microns to millimetre was not yet explored. This is the context of our study, whose goal is to make digital switching devices with a size of some millimetres and a large, pre-fixed deflection angle of ten degrees.

Paper Details

Date Published: 22 January 2005
PDF: 9 pages
Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); doi: 10.1117/12.590270
Show Author Affiliations
Alexandre Marchese, Lab. d'Analyse et d'Architecture des Systemes, CNRS (France)
Henri Camon, Lab. d'Analyse et d'Architecture des Systemes, CNRS (France)
Christian Ganibal, Lab. d'Analyse et d'Architecture des Systemes, CNRS (France)


Published in SPIE Proceedings Vol. 5717:
MEMS/MOEMS Components and Their Applications II
Albert K. Henning, Editor(s)

© SPIE. Terms of Use
Back to Top