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Proceedings Paper

Au/Cr/IZO thin film electrode for application of thermal controllable waveguide devices
Author(s): Huang-Chen Guo; Yung-Hsin Chen; Ying-Tsung Lu; Wann-Diing Tyan; Pong Lai; Cheng-Lin Yang
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Paper Abstract

A Au/Cr/IZO composite thin film for application of thermal electrode of the waveguide devices is proposed. It can be fabricated easily on the glass-based waveguide devices by sputtering deposition process. The hardness and impedance properties, as well as its adhesion with the glass substrate are investigated in this study.

Paper Details

Date Published: 4 April 2005
PDF: 8 pages
Proc. SPIE 5723, Optical Components and Materials II, (4 April 2005); doi: 10.1117/12.590246
Show Author Affiliations
Huang-Chen Guo, Industrial Technology Research Institute (Taiwan)
Yung-Hsin Chen, Industrial Technology Research Institute (Taiwan)
Ying-Tsung Lu, Industrial Technology Research Institute (Taiwan)
Wann-Diing Tyan, Industrial Technology Research Institute (Taiwan)
Pong Lai, Industrial Technology Research Institute (Taiwan)
Cheng-Lin Yang, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 5723:
Optical Components and Materials II
Shibin Jiang; Michel J.F. Digonnet, Editor(s)

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