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Proceedings Paper

Rib-type polyimides and polyimide-silica hybrid arrayed waveguide grating simulation and fabrication
Author(s): Wen-Jen Liu; Yi-Tsen Lai; Yin-Chieh Lai; Min-Hang Weng; Chih-Min Chen
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Paper Abstract

Polyimides and polyimide-silica hybrid AWG device with 2.2% and 1.6% refractive index difference (□), and the transmission spectrum of AWG's device indicated the insertion loss were -3.12 dB and -3.16 dB, crosstalk were -20 dB and -15 dB, and side-lobe were both lower than -60 dB, respectively, by 2D beam propagation method were investigated in this study. The smallest chip size of the whole device is smaller than 3.4 cm x 1.8 cm, and the highest coupling loss of the rib waveguide for single mode fiber was about -1.02 dB. Based on the 3D simulation results, the devices will be really fabricated by thin-film deposition, photolithography and dry-etching processes. Optical measurements of polyimides and polyimide-silica hybrid materials formed on quartz glass indicated, the refractive indexes of top cladding/core/bottom cladding layers at 1550 nm wavelength were 1.522/1.546/1.522 and 1.4907/1.53/1.4907, respectively. The extinction coefficients of all samples indicated approximately zero at 1550 nm wavelength. We will adopt these polyimides and polyimide-silica hybrid materials to perform real AWG fabrication. From atomic force microscopy (AFM) analysis of polyimides and polyimide-silica hybrid materials revealed, the surface average roughness was 0.236 nm and 0.364 nm, respectively. The structures of polyimides and polyimide-silica hybrid materials were identified by fourier transform infar ray (FTIR). High-resolution transmission electron microscopy (HRTEM/EDAX) was used to study the localized interface structure and compositional distribution. The morphology of rib structure waveguides, polyimides and polyimide-silica hybrid films were examined by scanning electron microscopy (SEM).

Paper Details

Date Published: 4 April 2005
PDF: 10 pages
Proc. SPIE 5723, Optical Components and Materials II, (4 April 2005); doi: 10.1117/12.590073
Show Author Affiliations
Wen-Jen Liu, I-Shou Univ. (Taiwan)
Yi-Tsen Lai, I-Shou Univ. (Taiwan)
Yin-Chieh Lai, National Chiao Tung Univ. (Taiwan)
Min-Hang Weng, National Nano Device Labs. (Taiwan)
Chih-Min Chen, National Chiao Tung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 5723:
Optical Components and Materials II
Shibin Jiang; Michel J.F. Digonnet, Editor(s)

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