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Proceedings Paper

Design and fabrication of pitch-tunable blaze grating
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Paper Abstract

A novel microelectromechanical grating with both pitch and blaze angle tuning functions has been designed, simulated, and fabricated and is reported in this paper. This grating device could change spectrum angle through adjusting grating pitch and make reflection match with a particular diffraction order by the blaze angle tuning. This grating could have better dispersion efficiency than most previous tunable gratings because of its small grating pitch. Besides, the reflective surfaces of our MEMS grating are constructed by surface-micromachining aluminum to get high reflective efficiency. For wide tuning range, this grating uses bulk actuators to provide large displacement of about 70um for tuning more than 1/10 of original pitch length. All tuning functions are operated by electrostatic force with a driving voltage below 120V.

Paper Details

Date Published: 22 January 2005
PDF: 9 pages
Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); doi: 10.1117/12.590020
Show Author Affiliations
Yu-Sheng Yang, National Tsing Hua Univ. (Taiwan)
Cheng-Hsien Liu, National Tsing Hua Univ. (Taiwan)


Published in SPIE Proceedings Vol. 5717:
MEMS/MOEMS Components and Their Applications II
Albert K. Henning, Editor(s)

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