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Proceedings Paper

Surface microfabrication of silica glass by LIBWE using DPSS-UV laser
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Paper Abstract

Surface micro-structuring of silica glass plates was performed by using laser-induced backside wet etching (LIBWE) upon irradiation with a single-mode laser beam from a diode-pumped solid state UV laser at 266 nm. We have succeeded in a well-defined micro-pattern formation without debris and microcrack formations around the etched area on the basis of Galvanometer-based point scanning system with the laser beam. This method is suitable for rapid prototyping and rapid manufacturing of surface microstructuing of silica glass in a convetional atmospheric environment.

Paper Details

Date Published: 12 April 2005
PDF: 6 pages
Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); doi: 10.1117/12.589933
Show Author Affiliations
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)
Yoshizo Kawaguchi, National Institute of Advanced Industrial Science and Technology (Japan)
Tadatake Sato, National Institute of Advanced Industrial Science and Technology (Japan)
Aiko Narazaki, National Institute of Advanced Industrial Science and Technology (Japan)
Ryozo Kurosaki, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 5713:
Photon Processing in Microelectronics and Photonics IV
Jim Fieret; David B. Geohegan; Friedrich G. Bachmann; Willem Hoving; Frank Träger; Peter R. Herman; Jan J. Dubowski; Tatsuo Okada; Kunihiko Washio; Yongfeng Lu; Craig B. Arnold, Editor(s)

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