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Proceedings Paper

Effects of laser-induced plasma in machining of transparent materials
Author(s): Viktor M. Kadan; Ivan V. Blonsky; Vadim O. Salnikov; Evgen V. Orieshko
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Paper Abstract

In this paper we report a new practical method of micromachining of transparent materials involving laser-induced plasma, using a conventional Q-switched Nd:KGW laser (1,06 μm). Micromarks and relieve grating with 3 μm pitch have been fabricated in sapphire, silica and glass, including the use of a LC numerical indicator as a mask. Influence of the cross-section size of a shined area on machining results was studied. It was found, that the density and temperature of laser-induced plasma at constant energy density of laser radiation rise with the increase of the cross-section size. Laser-induced plasma influences the ablation rate of transparent materials and metals in the opposite way.

Paper Details

Date Published: 22 January 2005
PDF: 8 pages
Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, (22 January 2005); doi: 10.1117/12.589607
Show Author Affiliations
Viktor M. Kadan, Institute of Physics (Ukraine)
Ivan V. Blonsky, Institute of Physics (Ukraine)
Vadim O. Salnikov, Institute of Physics (Ukraine)
Evgen V. Orieshko, Institute of Semiconductor Physics (Ukraine)


Published in SPIE Proceedings Vol. 5715:
Micromachining and Microfabrication Process Technology X
Mary-Ann Maher; Harold D. Stewart, Editor(s)

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