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Proceedings Paper

High-Q microring resonator for biochemical sensors
Author(s): Junpeng Guo; Michael J. Shaw; G. Allen Vawter; G. Ronald Hadley; Peter Esherick; Charles T. Sullivan
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Paper Abstract

The large refractive index difference between silicon nitride and silicon dioxide allows silicon nitride/dioxide waveguides to have a small mode size and low radiation bending loss. Low radiation bending loss enables high quality (Q) factor microring resonators. In this paper, we will present a record high quality factor microring resonator using silicon nitride and silicon dioxide on a silicon wafer. The microring resonator was fabricated using a deep UV photolithography and etching process. The microring resonator was critically coupled to a straight waveguide. An intrinsic quality factor of 240,000 has been measured. We will also present our result of using on-chip high-Q microring resonators for liquid phase chemical sensing application.

Paper Details

Date Published: 31 March 2005
PDF: 10 pages
Proc. SPIE 5728, Integrated Optics: Devices, Materials, and Technologies IX, (31 March 2005); doi: 10.1117/12.589467
Show Author Affiliations
Junpeng Guo, Sandia National Labs. (United States)
Michael J. Shaw, Sandia National Labs. (United States)
G. Allen Vawter, Sandia National Labs. (United States)
G. Ronald Hadley, Sandia National Labs. (United States)
Peter Esherick, Sandia National Labs. (United States)
Charles T. Sullivan, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 5728:
Integrated Optics: Devices, Materials, and Technologies IX
Yakov Sidorin; Christoph A. Waechter, Editor(s)

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