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Proceedings Paper

Direct-write e-beam sub-micron domain engineering in liquid phase epitaxy LiNbO3 thin films
Author(s): Ji-Won Son; Yin Yuen; Sergei S. Orlov; Ludwig Galambos; Lambertus Hesselink
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Paper Abstract

By using a direct-write e-beam technique with liquid phase epitaxy LiNbO3 thin films, we have successfully produced sub-micron domain structures for achieving dynamically switchable filters in a periodically poled lithium niobate (PPLN) waveguide. Sub-micron domain (~200 nm) structures with a period ~1.2 um are realized in liquid phase epitaxy LiNbO3 films on congruent LiNbO3 substrates by using the direct-write e-beam domain engineering method. In comparison with single crystal congruent LiNbO3 (CLN) and stoichiometric LiNbO3 (SLN), we show that LPE LiNbO3 is the most promising material for producing superior domain regularities and finer domain sizes than single crystals. A physical model is presented to qualitatively explain the observed differences in structure and regularity of the induced periodic domains among the three different materials we studied. We postulate that the higher Li/Nb ratio in LPE LN than in CLN enhances domain inversion initiation. Also, we believe that the vanadium incorporation and distortion due to the lattice mismatch between films and substrates enhance electron localization, domain wall pinning and domain nucleation in LPE materials, giving rise to better structures.

Paper Details

Date Published: 31 March 2005
PDF: 8 pages
Proc. SPIE 5728, Integrated Optics: Devices, Materials, and Technologies IX, (31 March 2005); doi: 10.1117/12.589312
Show Author Affiliations
Ji-Won Son, Stanford Univ. (United States)
Yin Yuen, Stanford Univ. (United States)
Sergei S. Orlov, Stanford Univ. (United States)
Ludwig Galambos, Stanford Univ. (United States)
Lambertus Hesselink, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 5728:
Integrated Optics: Devices, Materials, and Technologies IX
Yakov Sidorin; Christoph A. Waechter, Editor(s)

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