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Proceedings Paper

Laser-induced fluorocarbon coating onto fused silica optics
Author(s): Takayuki Funatsu; Masataka M. Murahara; Takayuki Okamoto
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Paper Abstract

The fluorocarbon thin film and fused silica glass was bonded for an ArF laser light transmittance by using silicon oil. The chemical main structure of the silicon oil has siloxane chains as in the same structure of quartz. This new bonding method was developed with silicone oil and excimer-lamp in an oxygen atmosphere. The silicone oil was put between the fused silica glass and the fluorocarbon (FEP), and an excimer-lamp was irradiated. The silicon oil ((-O-Si(CH3)-O)n) was photo-dissociated and reacted with the oxygen adsorbed on the silica glass surface to produce a SiO2. On the other hand, the H atoms photo-dissociated from the silicon oil pulled out the F atoms of the FEP. As a result, the FEP and the silica glass were combined. The results showed that the silicon oil changed to silica glass by the excited oxygen, which improved the UV rays under 200nm transmittance.

Paper Details

Date Published: 21 February 2005
PDF: 1 pages
Proc. SPIE 5647, Laser-Induced Damage in Optical Materials: 2004, (21 February 2005); doi: 10.1117/12.588387
Show Author Affiliations
Takayuki Funatsu, Tokai Univ. (Japan)
Masataka M. Murahara, Tokai Univ. (Japan)
Takayuki Okamoto, Okamoto Optics Works, Inc. (Japan)


Published in SPIE Proceedings Vol. 5647:
Laser-Induced Damage in Optical Materials: 2004
Gregory J. Exarhos; Arthur H. Guenther; Norbert Kaiser; Keith L. Lewis; M. J. Soileau; Christopher J. Stolz, Editor(s)

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