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Proceedings Paper

Laser microstructuring of silicon in dry and wet environments
Author(s): Sergey I. Kudryashov; Jacob M. Small; Susan D. Allen
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Paper Abstract

The impact effect of a vapor recoil pressure on single-shot threshold-like laser micro-structuring of Si via the Kelvin- Helmholtz-type instability has been revealed during transient and postmortem studies of explosive boiling of predeposited micron-size water droplets on a Si wafer surface. The micro-structuring mechanism assumes local excitation of surface capillary waves in a molten surface layer of the material underneath each water droplet by near-GPa recoil pressure of explosively boiling water and the following steam bubble oscillations. Water droplets and produced structural features (micron-size craters, bumps or others) have exhibited high symmetries in their surface arrangements. Similar structures were also observed on dry clean Si surfaces irradiated by single fs-laser pulses resulted from the same "impact" excitation of surface capillary waves in the Coulomb explosion regime.

Paper Details

Date Published: 12 April 2005
PDF: 11 pages
Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); doi: 10.1117/12.587191
Show Author Affiliations
Sergey I. Kudryashov, Arkansas State Univ. (United States)
Jacob M. Small, Arkansas State Univ. (United States)
Susan D. Allen, Arkansas State Univ. (United States)

Published in SPIE Proceedings Vol. 5713:
Photon Processing in Microelectronics and Photonics IV
Jim Fieret; David B. Geohegan; Friedrich G. Bachmann; Willem Hoving; Frank Träger; Peter R. Herman; Jan J. Dubowski; Tatsuo Okada; Kunihiko Washio; Yongfeng Lu; Craig B. Arnold, Editor(s)

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