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Proceedings Paper

Ion-beam deposition of fluoride thin films
Author(s): Ghanim A. Al-Jumaily
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Paper Abstract

Ion beam-based thin film deposition processes are reviewed. Results illustrating some of the benefits of ion bombardment to fluoride coatings are presented. Fluoride coatings deposited using ion beam processes have higher packing density, lower stress, improved durability, and better adhesion.

Paper Details

Date Published: 1 January 1992
PDF: 15 pages
Proc. SPIE 10261, Infrared Thin Films: A Critical Review, 1026108 (1 January 1992); doi: 10.1117/12.58692
Show Author Affiliations
Ghanim A. Al-Jumaily, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 10261:
Infrared Thin Films: A Critical Review
Ric P. Shimshock, Editor(s)

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