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Proceedings Paper

Laser absorption IR spectrometer for molecular analysis of high-purity volatile substances: detection of trace water concentrations in oxygen, argon, and monogermane
Author(s): Grigory G. Devyatykh; G. A. Maksimov; Alexander I. Nadezhdinskii; V. A. Khorshev; S. M. Shapin
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Paper Abstract

A setup is reported for molecular analysis of ultrapure volatile substances based on absorption two-channel computerized IR spectrometry with pulsed tunable injection lasers operating within the wavelength range from 4 to 12 microns. The setup is equipped with a heated vacuum system for gas supply and for gas mixtures preparation. Analytic characteristics are estimated in case of water detection in oxygen, argon, and monogermane; the detection limit is 8 x 10 exp -7 vol pct, 4 x 10 exp -7 vol pct, and 4 x 10 exp -7 vol pct, respectively.

Paper Details

Date Published: 1 April 1992
PDF: 20 pages
Proc. SPIE 1724, Tunable Diode Laser Applications, (1 April 1992); doi: 10.1117/12.58685
Show Author Affiliations
Grigory G. Devyatykh, General Physics Institute (Russia)
G. A. Maksimov, General Physics Institute (Russia)
Alexander I. Nadezhdinskii, General Physics Institute (Russia)
V. A. Khorshev, General Physics Institute (Russia)
S. M. Shapin, General Physics Institute (Russia)

Published in SPIE Proceedings Vol. 1724:
Tunable Diode Laser Applications
Alexander I. Nadezhdinskii; Alexander M. Prokhorov, Editor(s)

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