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Proceedings Paper

Laser interferential profilometer
Author(s): Vyacheslav B. Birman; V. Sedelnikov
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Paper Abstract

The paper presents an optical scheme for a precise focusing method. The beam reflected from the detail interferes with a reference beam, and optimal parameters for the optical scheme are calculated. It was found that the optical scheme sensibility does not depend on the focusing distance of the second objective.

Paper Details

Date Published: 1 April 1992
PDF: 4 pages
Proc. SPIE 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, (1 April 1992); doi: 10.1117/12.58652
Show Author Affiliations
Vyacheslav B. Birman, Mechanical Engineering Institute (Russia)
V. Sedelnikov, Mechanical Engineering Institute (Russia)


Published in SPIE Proceedings Vol. 1723:
LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces

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