Share Email Print
cover

Proceedings Paper

Local laser-induced deposition of thin films
Author(s): Vadim P. Veiko; A. I. Kaidanov; H. A. Kovachki; Elena A. Shakhno
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Possible mechanisms of tearing off and transference of the film from the donor substrate (target) to the acceptor substrate as a result of a local laser action are considered. Thermal, gas-dynamic and hydrodynamic models for explanation of a number of effects observed at local laser film deposition are proposed. The range of technological parameters close to optimal ones is determined.

Paper Details

Date Published: 1 April 1992
PDF: 7 pages
Proc. SPIE 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, (1 April 1992); doi: 10.1117/12.58635
Show Author Affiliations
Vadim P. Veiko, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
A. I. Kaidanov, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
H. A. Kovachki, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
Elena A. Shakhno, St. Petersburg Institute of Fine Mechanics and Optics (Russia)


Published in SPIE Proceedings Vol. 1723:
LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces

© SPIE. Terms of Use
Back to Top