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Proceedings Paper

Use of lasers in microtechnology of high-temperature superconducting thin films
Author(s): A. A. Blyablin; A. S. Kovalev; V. V. Korneev; Alexander N. Obraztsov; V. G. Pirogov; Boris I. Seleznev
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Paper Abstract

Laser ablation of a target and subsequent deposition of films is a widespread method of high temperature superconducting (HTSC) thin films fabrication. High intensity of laser light acting on the target ensures the provides high concentration of excited atoms and ions, that allows the reduction of the temperature needed for the epitaxial growth. High density of the evaporated materials stream near the substrate gives the possibility of fabricating very thin and unbroken films. All this features of laser assisted materials deposition allow the preparation of the epitaxial HTSC thin films of very high quality. In this article we briefly report the results of the conservation of stoichiometry in the deposited films. High temperature of evaporated materials in the laser plume application of lasers for HTSC films creation, their testing and structuring obtained in Moscow State University.

Paper Details

Date Published: 1 April 1992
PDF: 9 pages
Proc. SPIE 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, (1 April 1992); doi: 10.1117/12.58633
Show Author Affiliations
A. A. Blyablin, Moscow State Univ. (Russia)
A. S. Kovalev, Moscow State Univ. (Russia)
V. V. Korneev, Moscow State Univ. (Russia)
Alexander N. Obraztsov, Moscow State Univ. (Russia)
V. G. Pirogov, Moscow State Univ. (Russia)
Boris I. Seleznev, Moscow State Univ. (Russia)

Published in SPIE Proceedings Vol. 1723:
LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces
Nikolai I. Koroteev; Vladislav Ya. Panchenko, Editor(s)

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