Share Email Print
cover

Proceedings Paper

New techniques for patterned wafer inspection based on a model of human preattentive vision
Author(s): Virginia H. Brecher
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Details

Date Published: 1 March 1992
PDF: 8 pages
Proc. SPIE 1708, Applications of Artificial Intelligence X: Machine Vision and Robotics, (1 March 1992); doi: 10.1117/12.58594
Show Author Affiliations
Virginia H. Brecher, IBM/Thomas J. Watson Research Ctr. (United States)


Published in SPIE Proceedings Vol. 1708:
Applications of Artificial Intelligence X: Machine Vision and Robotics
Kevin W. Bowyer, Editor(s)

© SPIE. Terms of Use
Back to Top