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Proceedings Paper

Automated visual quality evaluation of CVD film
Author(s): W. Philip Kegelmeyer; Wilfred J. Hansen
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Paper Abstract

This study describes the implementation and performance of a new image analysis algorithm, ALOET, as applied to automatically distinguishing between acceptable and unacceptable chemical vapor deposition (CVD) diamond film. ALOET is a texture feature which measures the homogeneity of the edge orientations in a local window, and which is useful in differentially characterizing large and small polycrystalline structures. The analysis in this study includes a performance metric for film quality evaluation, numerical and visual performance results, and an example analytical model for determining the algorithm's control parameters.

Paper Details

Date Published: 1 March 1992
PDF: 11 pages
Proc. SPIE 1708, Applications of Artificial Intelligence X: Machine Vision and Robotics, (1 March 1992); doi: 10.1117/12.58563
Show Author Affiliations
W. Philip Kegelmeyer, Sandia National Labs. (United States)
Wilfred J. Hansen, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 1708:
Applications of Artificial Intelligence X: Machine Vision and Robotics
Kevin W. Bowyer, Editor(s)

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