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Proceedings Paper

Fast confocal image processing for inspection
Author(s): A. Ravishankar Rao; Frederick Y. Wu; Jon R. Mandeville; Pieter J. M. Kerstens
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Paper Abstract

The measurement of surface topography is an important inspection task as it provides useful information for process and quality control. A candidate technique for such an application is confocal imaging. The advantages of confocal imaging are that it is a noncontact measurement, can be operated at high speed (greater than 10 megapixels/sec) and submicron resolution, and provides height information in multilayered semitransparent materials. In this paper, we present a scheme for the fast processing of confocal images. The scheme consists of measuring the response function of the confocal system and deriving a deconvolution filter based on this response. The input signal is deconvolved in order to improve the depth resolution and then processed to identify significant peaks. These peaks represent the position of different surfaces in the object being inspected. For semitransparent materials, our scheme is capable of detecting up to two surfaces at a given location.

Paper Details

Date Published: 1 March 1992
PDF: 10 pages
Proc. SPIE 1708, Applications of Artificial Intelligence X: Machine Vision and Robotics, (1 March 1992); doi: 10.1117/12.58562
Show Author Affiliations
A. Ravishankar Rao, IBM/Thomas J. Watson Research Ctr. (United States)
Frederick Y. Wu, IBM/Thomas J. Watson Research Ctr. (United States)
Jon R. Mandeville, IBM/Thomas J. Watson Research Ctr. (United States)
Pieter J. M. Kerstens, IBM/General Technology Div. (United States)

Published in SPIE Proceedings Vol. 1708:
Applications of Artificial Intelligence X: Machine Vision and Robotics
Kevin W. Bowyer, Editor(s)

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