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Proceedings Paper

RF MEMS devices for communication systems
Author(s): R. R. Mansour; D. Yan; M. Bakri-Kassem; M. Daneshmand; Neil Sarker
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Paper Abstract

This paper addresses the use of RF MEMS devices in wireless and satellite communication systems. It describes the MEMS actuators typically needed for such devices. Novel configurations are presented for MEMS variable capacitors, MEMS tunable inductors and RF MEMS mutiport switches. The tuning range of the variable capacitor was measured and found to be 280%, which far exceeds that of the traditional parallel plate MEMS variable capacitors. The MEMS tunable inductor is realized using MEMS fixed inductors, capacitors and a variable MEMS capacitor. The proposed MEMS multiport switch has demonstrated a superior RF performance up to 20 GHz.

Paper Details

Date Published: 16 February 2004
PDF: 5 pages
Proc. SPIE 5648, Smart Materials III, (16 February 2004); doi: 10.1117/12.585325
Show Author Affiliations
R. R. Mansour, Univ. of Waterloo (Canada)
D. Yan, Univ. of Waterloo (Canada)
M. Bakri-Kassem, Univ. of Waterloo (Canada)
M. Daneshmand, Univ. of Waterloo (Canada)
Neil Sarker, Univ. of Waterloo (Canada)

Published in SPIE Proceedings Vol. 5648:
Smart Materials III
Alan R. Wilson, Editor(s)

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