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Proceedings Paper

Nanofabrication of charge-based Si:P quantum computer devices using single-ion implantation
Author(s): Mladen Mitic; Soren E. Andresen; Victor C. Chan; Tilo Markus Buehler; Andrew J. Ferguson; Eric Gauja; Fay E. Hudson; David J. Reilly; A. R. Hamilton; Andrew S. Dzurak; Robert G. Clark; Changyi Yang; Toby Hopf; Christopher I. Pakes; David N. Jamieson
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Paper Abstract

We report on progress towards a charge-based qubit using phosphorus atoms implanted in a silicon substrate. Prototype devices have been fabricated using standard lithographic techniques together with a new method of controlled single ion implantation using on-chip detector electrodes. Positional accuracy of the implanted ions was achieved using a nanoaperture mask defined using electron beam lithography. The two implanted phosphorus atoms are positioned ~50 nm apart, to form a qubit test device. A series of process steps has been developed to repair implant damage, define surface control gates, and to define single electron transistors used for qubit readout via the detection of sub-electron charge transfer signals. Preliminary electrical measurements on these devices show single charge transfer events that are resilient to thermal cycling.

Paper Details

Date Published: 23 February 2005
PDF: 9 pages
Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); doi: 10.1117/12.583284
Show Author Affiliations
Mladen Mitic, Univ. of New South Wales (Australia)
Soren E. Andresen, Univ. of New South Wales (Australia)
Victor C. Chan, Univ. of New South Wales (Australia)
Tilo Markus Buehler, Univ. of New South Wales (Australia)
Andrew J. Ferguson, Univ. of New South Wales (Australia)
Eric Gauja, Univ. of New South Wales (Australia)
Fay E. Hudson, Univ. of New South Wales (Australia)
David J. Reilly, Univ. of New South Wales (Australia)
A. R. Hamilton, Univ. of New South Wales (Australia)
Andrew S. Dzurak, Univ. of New South Wales (Australia)
Robert G. Clark, Univ. of New South Wales (Australia)
Changyi Yang, Univ. of Melbourne (Australia)
Toby Hopf, Univ. of Melbourne (Australia)
Christopher I. Pakes, Univ. of Melbourne (Australia)
David N. Jamieson, Univ. of Melbourne (Australia)


Published in SPIE Proceedings Vol. 5650:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Jung-Chih Chiao; David N. Jamieson; Lorenzo Faraone; Andrew S. Dzurak, Editor(s)

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