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Proceedings Paper

Silicon photonics: applications, recent results, and integration challenges as they relate to CMOS processing--an industry perspective
Author(s): Oded Cohen; Mike Salib; Mike Morse; Mario J. Paniccia
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Paper Abstract

Silicon photonics, especially that based on silicon-on-insulator (SOI), has recently attracted a great deal of attention. The mature industrial infrastructure of CMOS fabrication offers an opportunity for low cost silicon based opto-electronic solutions for applications ranging from telecommunications to chip-to-chip interconnects. The high volume and high performance manufacturing disciplines are advantageous to electro-optics application development and fabrication. However, many technical hurdles still need to be addressed. This paper will give an overview of these opportunities as well as discuss some practical issues and challenges concerning processing silicon photonic devices in a high volume CMOS manufacturing environment.

Paper Details

Date Published: 31 January 2005
PDF: 5 pages
Proc. SPIE 5624, Semiconductor and Organic Optoelectronic Materials and Devices, (31 January 2005); doi: 10.1117/12.583066
Show Author Affiliations
Oded Cohen, Intel Corp. (Israel)
Mike Salib, Intel Corp. (United States)
Mike Morse, Intel Corp. (United States)
Mario J. Paniccia, Intel Corp. (United States)

Published in SPIE Proceedings Vol. 5624:
Semiconductor and Organic Optoelectronic Materials and Devices
Chung-En Zah; Yi Luo; Shinji Tsuji, Editor(s)

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