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Proceedings Paper

Benzocyclobutene (BCB)-based spiral inductor for wireless application
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Paper Abstract

This paper describes new type of MEMS spiral inductor using benzocyclobutene (BCB) for wireless applications. BCB consists of several attractive features for on-chip RF inductors, i.e., high resistivity, low dielectric constant and lower curing temperature. The fabricated inductor coils had 2.5 turns with 20μm for width, 20μm for pitch and the thickness of 2μm. The inductor coils are suspended about 12μm from the bottom BCB substrate. Our measured quality factor was 19 at 3.1GHz frequency. The measured inductance was approximately 3nH and it remained constant up to 10 GHz. The self resonant frequency (SRF) was at 13.6GHz.

Paper Details

Date Published: 22 January 2005
PDF: 5 pages
Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); doi: 10.1117/12.583027
Show Author Affiliations
Kee-Keun Lee, Ajou Univ. (South Korea)
Bruce C. Kim, Arizona State Univ. (United States)


Published in SPIE Proceedings Vol. 5717:
MEMS/MOEMS Components and Their Applications II
Albert K. Henning, Editor(s)

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