Share Email Print
cover

Proceedings Paper

Damage thresholds of HfO2/SiO2 and ZrO2/SiO2 high reflectors at 1.064 microns deposited by reactive DC magnetron sputtering
Author(s): David Reicher; Martha Navarro; Robin Sydenstricker; Jason Oberling; Micheal Marquez; Julio Villafuert; Albert A. Ogloza; Joni Pentony; Peter Langston; David O'Conner; Denton Marrs
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

HfO2/SiO2 and ZrO2/SiO2 high reflectors at 1.064 microns were deposited by pulsed reactive DC magnetron sputtering. These dielectric thin film high reflectors were deposited with and without the use of an electron source. The electron source greatly decreased arcing of the magnetrons during the deposition process resulting in thin films with fewer defects. The high reflectors were laser damage tested at 1.064 microns. The optical properties of the thin film coatings were characterized prior to laser damage testing. Optical characterization techniques included angle resolved scatter (BRDF), total integrated scatter (TIS), and adiabatic calorimetry. The dependence of the laser damage threshold and optical properties on deposition conditions is reported.

Paper Details

Date Published: 21 February 2005
PDF: 8 pages
Proc. SPIE 5647, Laser-Induced Damage in Optical Materials: 2004, (21 February 2005); doi: 10.1117/12.583022
Show Author Affiliations
David Reicher, S-Systems Corp. (United States)
Martha Navarro, S-Systems Corp. (United States)
Robin Sydenstricker, S-Systems Corp. (United States)
Jason Oberling, S-Systems Corp. (United States)
Micheal Marquez, S-Systems Corp. (United States)
Julio Villafuert, Air Force Research Lab. (United States)
Albert A. Ogloza, Naval Air Warfare Ctr. (United States)
Joni Pentony, Naval Air Warfare Ctr. (United States)
Peter Langston, Naval Air Warfare Ctr. (United States)
David O'Conner, Naval Air Warfare Ctr. (United States)
Denton Marrs, Naval Air Warfare Ctr. (United States)


Published in SPIE Proceedings Vol. 5647:
Laser-Induced Damage in Optical Materials: 2004
Gregory J. Exarhos; Arthur H. Guenther; Norbert Kaiser; Keith L. Lewis; M. J. Soileau; Christopher J. Stolz, Editor(s)

© SPIE. Terms of Use
Back to Top