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Proceedings Paper

Characterization of laser micromachining of metals
Author(s): Phillip J. McMahon; Richard F. Muscat; Peter Vincent; Christian Formica; Alan R. Wilson
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Paper Abstract

UV Laser micro-machining of metals for the production of micro devices is generating significant interest. This approach to micro-fabrication has the distinct advantage of being non-contact, rapid, flexible and precise. At present, the laser micro-manufacture of new micro device designs, or the introduction of untried materials requires exploration of laser parameters to achieve acceptable yields. We have undertaken a quantitative study of UV laser micro-machining of 2024 Aluminium, Copper and marine grade steel. These metals are of broad application in the manufacture of sensors for structural health monitoring and are of particular interest to defence. The UV laser micro-machining study was carried out using a frequency tripled Nd YAG laser. In this paper the influence of the number of passes of the laser over the metal surface are compared with cutting profiles, and ablation or melt behaviour as a function of cut depth.

Paper Details

Date Published: 23 February 2005
PDF: 10 pages
Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); doi: 10.1117/12.582999
Show Author Affiliations
Phillip J. McMahon, Defence Science and Technology Organization (Australia)
Richard F. Muscat, Defence Science and Technology Organization (Australia)
Peter Vincent, Defence Science and Technology Organization (Australia)
Christian Formica, RMIT Univ. (Australia)
Alan R. Wilson, Defence Science and Technology Organization (Australia)


Published in SPIE Proceedings Vol. 5650:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Jung-Chih Chiao; David N. Jamieson; Lorenzo Faraone; Andrew S. Dzurak, Editor(s)

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