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Proceedings Paper

LiNbO3 thin films grown on MgO (100) substrates by pulsed laser deposition
Author(s): Nadya E. Stankova; Svetlen H. Tonchev; Eniko Gyorgy; Gabriel Socol; Ion N. Mihailescu
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Paper Abstract

LiNbO3 thin films were grown on (100) MgO substrates by pulsed KrF* (λ = 248 nm, τFWHM~20 ns, ν = 1 Hz) laser ablation of Li-rich ceramic targets in low pressure oxygen atmosphere. The substrates were heated during the thin film deposition process at 550°C. The as-grown thin films were submitted to a heat treatment in oxygen atmosphere. Moreover, after analyses the films were annealed for the second time, for 2 hours in air at atmospheric pressure. We studied the effect of ambient gas pressure and heat treatments on the stoichiometry, structure and optical properties of the deposited films. The composition and crystalline state of the deposited films were investigated by X-ray diffraction (XRD), Rutherford backscattering spectroscopy (RBS) and nuclear reaction analyses (NRA).

Paper Details

Date Published: 21 October 2004
PDF: 4 pages
Proc. SPIE 5581, ROMOPTO 2003: Seventh Conference on Optics, (21 October 2004); doi: 10.1117/12.582898
Show Author Affiliations
Nadya E. Stankova, Institute of Electronics (Bulgaria)
Svetlen H. Tonchev, Institute of Solid State Physics (Bulgaria)
Eniko Gyorgy, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Gabriel Socol, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Ion N. Mihailescu, National Institute for Laser, Plasma, and Radiation Physics (Romania)


Published in SPIE Proceedings Vol. 5581:
ROMOPTO 2003: Seventh Conference on Optics
Valentin I. Vlad, Editor(s)

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