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Proceedings Paper

Pt, Pd, Ni metallic thin films deposited by pulsed laser ablation
Author(s): Nicusor Doinel Scarisoreanu; Ionut Nicolae; Constantin Grigoriu; Maria Dinescu; Makoto Hirai; Tsuneo Suzuki; Kiyoshi Yatsui
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Paper Abstract

We have investigated thin films of Ni, Pt, Pd, Ni-Pt and Ni-Pd deposited by pulsed laser ablation. Our study was focused on the correlation of layer morphology and composition vs. synthesis parameters (material, laser fluence and wavelength). In order to obtain bimetallic films we alternatively irradiated two different metal targets. A Nd:YAG laser (λ = 355 and 532 nm, 5 ns pulse duration, fluence 15 - 30 J/cm2) was used. Film analysis was made by AFM and RBS. The synthesized layers had a roughness (Ra) between 15 and 40 nm for Pt and Pd and between 80 and 120 nm for Ni. The rate deposition was in the range of 0.04 - 0.8 Å. In the composite layers, in condition of equally radiated targets, the Ni/Pd at. concentration was 50/50%, while for the Ni/Pt layer was 30/70%.

Paper Details

Date Published: 21 October 2004
PDF: 5 pages
Proc. SPIE 5581, ROMOPTO 2003: Seventh Conference on Optics, (21 October 2004); doi: 10.1117/12.582895
Show Author Affiliations
Nicusor Doinel Scarisoreanu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Ionut Nicolae, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Constantin Grigoriu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Maria Dinescu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Makoto Hirai, Nagaoka Univ. of Technology (Japan)
Tsuneo Suzuki, Nagaoka Univ. of Technology (Japan)
Kiyoshi Yatsui, Nagaoka Univ. of Technology (Japan)


Published in SPIE Proceedings Vol. 5581:
ROMOPTO 2003: Seventh Conference on Optics

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