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Proceedings Paper

Scanning micromirrors: an overview
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Paper Abstract

An overview of the current state of the art in scanning micromirror technology for switching, imaging, and beam steering applications is presented. The requirements that drive the design and fabrication technology are covered. Electrostatic, electromagnetic, and magnetic actuation techniques are discussed as well as the motivation toward combdrive configurations from parallel plate configurations for large diameter (mm range) scanners. Suitability of surface micromachining, bulk micromachining, and silicon on insulator (SOI) micromachining technology is presented in the context of the length scale and performance for given scanner applications.

Paper Details

Date Published: 25 October 2004
PDF: 13 pages
Proc. SPIE 5604, Optomechatronic Micro/Nano Components, Devices, and Systems, (25 October 2004); doi: 10.1117/12.582849
Show Author Affiliations
Pamela Rae Patterson, HRL Labs., LLC (United States)
Dooyoung Hah, Univ. of California/Los Angeles (United States)
Makoto Fujino, Topcon Corp. (Japan)
Wibool Piyawattanametha, Univ. of California/Los Angeles (United States)
Ming C. Wu, Univ. of California/Los Angeles (United States)


Published in SPIE Proceedings Vol. 5604:
Optomechatronic Micro/Nano Components, Devices, and Systems
Yoshitada Katagiri, Editor(s)

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