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Proceedings Paper

Scanning confocal microscopy for measuring diameter and linewidth: numerical modeling
Author(s): Gregory E. Obarski; Timothy J. Drapela; Matthew Young
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Paper Abstract

The image of a circular edge was calculated as determined by a scanning confocal microscope with fully coherent illumination. In scalar theory, the quarter-intensity point locates the geometrical-optics image of a straight edge. For a circular object, however, the quarter- intensity point is displaced from the geometrical-optics image of the edge according to the diameter of the object. For example, for an object that has a diameter of 21 resolution limits the displacement error is approximately 0.01 resolution limits. The error that results from locating the quarter-intensity point for diameters as small as 1 resolution limit is given. The error is even greater if the object is scanned off-axis. For example, the error for an object whose diameter is 21 resolution limits and which is scanned 3 resolution limits off-axis is approximately 0.45 resolution limits. Finally errors are calculated for vertical lines of width as small as 1 resolution limit.

Paper Details

Date Published: 1 April 1992
PDF: 12 pages
Proc. SPIE 1640, Time-Resolved Laser Spectroscopy in Biochemistry III, (1 April 1992); doi: 10.1117/12.58272
Show Author Affiliations
Gregory E. Obarski, National Institute of Standards and Technology (United States)
Timothy J. Drapela, National Institute of Standards and Technology (United States)
Matthew Young, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 1640:
Time-Resolved Laser Spectroscopy in Biochemistry III
Joseph R. Lakowicz, Editor(s)

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