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Proceedings Paper

AFM-based micro/nanoscale lithography of poly(dimethylsiloxane): stick-slip on a softpolymer
Author(s): Jolanta Anna Watson; Sverre Myhra; Christopher L. Brown; Gregory Shaun Watson
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Paper Abstract

Silicone rubbers have steadily gained importance in industry since their introduction in the 1960’s. Poly(dimethylsiloxane) (PDMS) is a relatively soft and optically clear, two-part elastomer with interesting and, more importantly, useful physical and electrical properties. Some of its common applications include protective coatings (e.g., against moisture, environmental attack, mechanical and thermal shock and vibrations), and encapsulation (e.g., amplifiers, inductive coils, connectors and circuit boards). The polymer has attracted recent interest for applications in soft lithography. The polymer is now routinely used as a patterned micro-stamp for chemical modification of surfaces, in particular Au substrates. Prominent stick-slip effects, surface relaxation and elastic recovery were found to be associated with micro/nano manipulation of the polymer by an AFM-based contact mode methodology. Those effects provide the means to explore in detail the meso-scale tip-to-surface interactions between a tip and a soft surface. The dependence of scan speed, loading force, attack angle and number of scan lines have been investigated.

Paper Details

Date Published: 23 February 2005
PDF: 9 pages
Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); doi: 10.1117/12.582650
Show Author Affiliations
Jolanta Anna Watson, Griffith Univ. (Australia)
Sverre Myhra, Griffith Univ. (Australia) and Univ. of Oxford (United Kingdom)
Christopher L. Brown, Griffith Univ. (Australia)
CRC for MicroTechnology (Australia)
Gregory Shaun Watson, Griffith Univ. (Australia)


Published in SPIE Proceedings Vol. 5650:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Jung-Chih Chiao; David N. Jamieson; Lorenzo Faraone; Andrew S. Dzurak, Editor(s)

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