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Proceedings Paper

Micro and nanosystem packaging challenges and opportunities
Author(s): Robert Mehalso
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Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, ; doi: 10.1117/12.582573
Show Author Affiliations
Robert Mehalso, Microtec Associates (United States)


Published in SPIE Proceedings Vol. 5650:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Jung-Chih Chiao; David N. Jamieson; Lorenzo Faraone; Andrew S. Dzurak, Editor(s)

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