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Proceedings Paper

Fabrication of integrated lens pair test device
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Paper Abstract

A silica microlens has been proposed which can be integrated with planar optical waveguide circuits. In order to fabricate the microlens, two deep silica etches must be performed. RIE is the prefered process as under certain conditions it is anisotropic. This paper reports on a study of different masking materials and plasma etch conditions trialed for the deep silica etch.

Paper Details

Date Published: 28 February 2005
PDF: 6 pages
Proc. SPIE 5649, Smart Structures, Devices, and Systems II, (28 February 2005); doi: 10.1117/12.582391
Show Author Affiliations
Mark Mackenzie, Univ. of New South Wales (Australia)
Chee Yee Kwok, Univ. of New South Wales (Australia)
G. D. Peng, Univ. of New South Wales (Australia)


Published in SPIE Proceedings Vol. 5649:
Smart Structures, Devices, and Systems II
Said F. Al-Sarawi, Editor(s)

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