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Proceedings Paper

Self-assembled GaAs micromirrors monolithically integrated with LEDs
Author(s): Nethaji Dharmarasu; Kazuyoshi Kubota; Shanmugam Saravanan; Pablo Oscar Vaccaro; Nobuo Saito
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Paper Abstract

We present the results on the monolithic integration of self-assembled GaAs micromirrors with light emitting diodes. The micromirrors were self-assembled by the strain-driven mechanism, which control the micromirror standing position and flatness. The device epi-layer structure and the fabrication processes were optimized. Self-locking mechanism was also employed to precisely position and enhance the mechanical strength of the assembled micromirrors. Light emission was observed on the integrated devices. For the first time, the effectiveness of the self-assembled micromirrors was confirmed in the monolithic integration with LEDs on GaAs. This result shows the feasibility of GaAs-based micro-opto-electromechanical systems for photonics applications.

Paper Details

Date Published: 23 February 2005
PDF: 6 pages
Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); doi: 10.1117/12.582315
Show Author Affiliations
Nethaji Dharmarasu, Advanced Telecommunications Research Institute International (Japan)
Kazuyoshi Kubota, Advanced Telecommunications Research Institute International (Japan)
Shanmugam Saravanan, Advanced Telecommunications Research Institute International (Japan)
Pablo Oscar Vaccaro, Advanced Telecommunications Research Institute International (Japan)
Nobuo Saito, Advanced Telecommunications Research Institute International (Japan)


Published in SPIE Proceedings Vol. 5650:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Jung-Chih Chiao; David N. Jamieson; Lorenzo Faraone; Andrew S. Dzurak, Editor(s)

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