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Proceedings Paper

Fabrication and tests of a MEMS-based double-beam cantilever flow sensor with clarifying of temperature effect
Author(s): Junguo Pang; Takehiko Segawa; Tsuyoshi Ikehara; Hiro Yoshida; Yoshihiro Kikushima; Hiroyuki Abe; Ryutaro Meada
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Paper Abstract

This paper presents the fabrication process of a MEMS-based cantilever flow sensor (CFS) with double cantilever beams and the test results of CFS in a wind-tunnel. Four boron-doped piezoresistive strain gauges at the base of each cantilever beam compose the four arms of the Wheatstone bridge. The output of CFS will change signs as piezoresistors at the base of the cantilever beam undergo compressive or tensile stresses. Analyses and experimental results suggest that double-beam CFS can be applied not only as a flow direction discriminator but also as a wall skin-friction sensor, which could be used in the system of active flow control for drag reduction and separation suppression in the boundary layers on a wing section. Temperature effect is commonly encountered in the application of MEMS-based piezoresistive strain gauges. By comparing the outputs of CFS when front side and back side of it facing the flow respectively, we are able to clarify the contribution of temperature effect on the output of CFS sensor and give more accurate results on flow measurement.

Paper Details

Date Published: 28 February 2005
PDF: 12 pages
Proc. SPIE 5649, Smart Structures, Devices, and Systems II, (28 February 2005); doi: 10.1117/12.582250
Show Author Affiliations
Junguo Pang, National Institute of Advanced Industrial Science and Technology (Japan)
Takehiko Segawa, National Institute of Advanced Industrial Science and Technology (Japan)
Tsuyoshi Ikehara, National Institute of Advanced Industrial Science and Technology (Japan)
Hiro Yoshida, National Institute of Advanced Industrial Science and Technology (Japan)
Yoshihiro Kikushima, National Institute of Advanced Industrial Science and Technology (Japan)
Hiroyuki Abe, National Institute of Advanced Industrial Science and Technology (Japan)
Ryutaro Meada, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 5649:
Smart Structures, Devices, and Systems II
Said F. Al-Sarawi, Editor(s)

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