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Proceedings Paper

Self-priming and bubble tolerant micropump
Author(s): Guolin Xu; Francis E. H. Tay; Ciprian Iliescu; Vincent Luar
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Paper Abstract

A self-priming and bubble tolerant planar micro-pump, which is fabricated by traditional technology, has been demonstrated and characterized. The micro-pump has a simple three-layered structure. Its two pump housings are made of polycarbonate and they are fabricated by computer numerical control (CNC) machine. The actuation membrane, which acts as the inlet and outlet valve membrane is cast in polydimethylsiloxane (PDMS). Using the PDMS membrane to act as the actuation membrane and valve membrane, we have solved the problem of sealing and poor compression ratio that most silicon based micro-pump faced. From the model of the membrane stroke volume, the flow rate of the pump is insensitive to the pump output pressure, and the output flow rate is linearly varying with actuating frequency. Flow rate up to 1000 ul/min of liquid has been achieved. More than 2m pump-head has been obtained when using water as the pumping medium. The robustness of the pump makes it suitable for disposable applications like biochip system.

Paper Details

Date Published: 16 February 2005
PDF: 8 pages
Proc. SPIE 5651, Biomedical Applications of Micro- and Nanoengineering II, (16 February 2005); doi: 10.1117/12.581965
Show Author Affiliations
Guolin Xu, Institute of Bioengineering and Nanotechnology (Singapore)
Francis E. H. Tay, Institute of Bioengineering and Nanotechnology (Singapore)
National Univ. of Singapore (Singapore)
Ciprian Iliescu, Institute of Bioengineering and Nanotechnology (Singapore)
Vincent Luar, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 5651:
Biomedical Applications of Micro- and Nanoengineering II
Dan V. Nicolau, Editor(s)

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