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Proceedings Paper

Microshutter array development for the James Webb space telescope
Author(s): Mary J. Li; Nadine Acuna; Edward Amatucci; Michael Beamesderfer; Ray A. Boucarut; Sachi Babu; Sateesh Bajikar; Audrey J. Ewin; Rainer Fettig; David E. Franz; Larry Hess; Ron Hu; Murzy D. Jhabvala; Daniel Kelly; Todd T. King; Gunther Kletetschka; Carl A. Kotechi; Alexander Kutyrev; James P. Loughlin; Bernard A. Lynch; Harvey Moseley; Brent Mott; Bill Newell; Lance Oh; David A. Rapchun; Chris Ray; Carol Sappington; Eric Schulte; Scott Schwinger; Wayne Smith; Steve Snodgrass; Leroy M. Sparr; Rosalind Steptoe-Jackson; Liqin L. Wang; Yun Zheng; Chris A. Zincke
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Paper Abstract

Micro Electromechanical System (MEMS) microshutter arrays are being developed at NASA Goddard Space Flight Center for use as a field selector of the Near Infrared Spectrograph (NIRSpec) on the James Webb Space Telescope (JWST). The microshutter arrays are designed for the spontaneous selection of a large number of objects in the sky and the transmission of light to the NIRSpec detector with high contrast. The JWST environment requires cryogenic operation at 35 K. Microshutter arrays are fabricated out of silicon-on-insulator (SOI) silicon wafers. Arrays are close-packed silicon nitride membranes with a pixel size of 100 x 200 μm. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. Light shields are processed for blocking light from gaps between shutters and frames. The mechanical shutter arrays are fabricated using MEMS technologies. The processing includes multi-layer metal depositions, the patterning of magnetic stripes and shutter electrodes, a reactive ion etching (RIE) to form shutters out of the nitride membrane, an anisotropic back-etch for wafer thinning, followed by a deep RIE (DRIE) back-etch to form mechanical supporting grids and release shutters from the silicon substrate. An additional metal deposition is used to form back electrodes. Shutters are actuated by a magnetic force and latched using an electrostatic force. Optical tests, addressing tests, and life tests are conducted to evaluate the performance and the reliability of microshutter arrays.

Paper Details

Date Published: 23 February 2005
PDF: 8 pages
Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); doi: 10.1117/12.581861
Show Author Affiliations
Mary J. Li, NASA Goddard Space Flight Ctr. (United States)
Nadine Acuna, NASA Goddard Space Flight Ctr. (United States)
QSS Group Inc. (United States)
Edward Amatucci, NASA Goddard Space Flight Ctr. (United States)
Michael Beamesderfer, NASA Goddard Space Flight Ctr. (United States)
Ray A. Boucarut, NASA Goddard Space Flight Ctr. (United States)
Sachi Babu, NASA Goddard Space Flight Ctr. (United States)
Sateesh Bajikar, NASA Goddard Space Flight Ctr. (United States)
QSS Group, Inc. (United States)
Audrey J. Ewin, NASA Goddard Space Flight Ctr. (United States)
Rainer Fettig, NASA Goddard Space Flight Ctr. (United States)
Raytheon Corp. (United States)
David E. Franz, NASA Goddard Space Flight Ctr. (United States)
Raytheon Corp. (United States)
Larry Hess, NASA Goddard Space Flight Ctr. (United States)
Raytheon Corp. (United States)
Ron Hu, NASA Goddard Space Flight Ctr. (United States)
Raytheon Corp. (United States)
Murzy D. Jhabvala, NASA Goddard Space Flight Ctr. (United States)
Daniel Kelly, NASA Goddard Space Flight Ctr. (United States)
QSS Group, Inc. (United States)
Todd T. King, NASA Goddard Space Flight Ctr. (United States)
Gunther Kletetschka, NASA Goddard Space Flight Ctr. (United States)
The Catholic Univ. of America (United States)
Carl A. Kotechi, NASA Goddard Space Flight Ctr. (United States)
Alexander Kutyrev, NASA Goddard Space Flight Ctr. (United States)
Raytheon Corp. (United States)
James P. Loughlin, NASA Goddard Space Flight Ctr. (United States)
Bernard A. Lynch, NASA Goddard Space Flight Ctr. (United States)
Raytheon Corp. (United States)
Harvey Moseley, NASA Goddard Space Flight Ctr. (United States)
Brent Mott, NASA Goddard Space Flight Ctr. (United States)
Bill Newell, NASA Goddard Space Flight Ctr. (United States)
Orbital Science Corp. (United States)
Lance Oh, NASA Goddard Space Flight Ctr. (United States)
Raytheon Corp. (United States)
David A. Rapchun, NASA Goddard Space Flight Ctr. (United States)
Raytheon Corp. (United States)
Chris Ray, NASA Goddard Space Flight Ctr. (United States)
Raytheon Corp. (United States)
Carol Sappington, NASA Goddard Space Flight Ctr. (United States)
Eric Schulte, NASA Goddard Space Flight Ctr. (United States)
QSS Group, Inc. (United States)
Scott Schwinger, NASA Goddard Space Flight Ctr. (United States)
Wayne Smith, NASA Goddard Space Flight Ctr. (United States)
Orbital Science Corp. (United States)
Steve Snodgrass, NASA Goddard Space Flight Ctr. (United States)
Qss Group, Inc. (United States)
Leroy M. Sparr, NASA Goddard Space Flight Ctr. (United States)
Rosalind Steptoe-Jackson, NASA Goddard Space Flight Ctr. (United States)
Liqin L. Wang, NASA Goddard Space Flight Ctr. (United States)
Swales Aerospace Co. (United States)
Yun Zheng, NASA Goddard Space Flight Ctr. (United States)
QSS Group Inc. (United States)
QSS Group Inc. (United States)
Chris A. Zincke, NASA Goddard Space Flight Ctr. (United States)
QSS Group Inc. (United States)


Published in SPIE Proceedings Vol. 5650:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Jung-Chih Chiao; David N. Jamieson; Lorenzo Faraone; Andrew S. Dzurak, Editor(s)

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