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Proceedings Paper

Ultrahigh-frequency MEMS/NEMES sensors
Author(s): Bohua Sun
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Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, ; doi: 10.1117/12.581402
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Bohua Sun, Cape Peninsula Univ. of Technology (South Africa)
Jinan Univ. (China)


Published in SPIE Proceedings Vol. 5641:
MEMS/MOEMS Technologies and Applications II
Zhichun Ma; Guofan Jin; Xuyuan Chen, Editor(s)

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