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Proceedings Paper

Low-loss ridge Ti:LiNbO3 waveguides fabrication
Author(s): Vadim Dobrusin; Shlomo Ruschin
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Paper Abstract

In this work we discuss a method of smooth waveguide fabrication by wet etching, using a novel mixture of organic and inorganic acids. We fabricated 4.5μm-deep large single mode waveguides with walls and edges roughness comparable with the roughness of non-etched regions. Surface and wall roughness as well as etching rates and propagation losses are presented and compared to characteristics achieved by traditional wet etching recipes. The method was developed as part of the effort to implement fast and widely tunable AWG-based wavelength filter with channel spacing suitable for dense WDM networks.

Paper Details

Date Published: 20 December 2004
PDF: 4 pages
Proc. SPIE 5577, Photonics North 2004: Optical Components and Devices, (20 December 2004); doi: 10.1117/12.581088
Show Author Affiliations
Vadim Dobrusin, Tel Aviv Univ. (Israel)
Shlomo Ruschin, Tel Aviv Univ. (Israel)


Published in SPIE Proceedings Vol. 5577:
Photonics North 2004: Optical Components and Devices
John C. Armitage; Simon Fafard; Roger A. Lessard; George A. Lampropoulos, Editor(s)

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