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Proceedings Paper

Development of a MEMS-based micro combustor for a micro gas turbine engine
Author(s): Xue Chuan Shan; Yu Feng Jin; Zhen Feng Wang; Chee Khuen Wong; Y. Murakoshi; Ryutaro Maeda
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Paper Abstract

This paper reports on design, fabrication and characterisation of a MEMS-based micro combustor for micro power generation systems. The first micro combustor implemented was a static gas turbine engine. The micro combustor was composed of seven silicon wafers and fabricated using deep reactive ion etching (DRIE). The size of the prototype was 21mmx21mmx4.4 mm. The combustor was assembled, aligned, ignited and tested under a fixture jig. The temperature near the exit of the combustor reached 1550 K, when the mass flow rate and fuel/air equivalence ratio were 0.06 g/sec and 0.8, respectively.

Paper Details

Date Published: 23 February 2005
PDF: 8 pages
Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); doi: 10.1117/12.580783
Show Author Affiliations
Xue Chuan Shan, Singapore Institute of Manufacturing Technology (Singapore)
Yu Feng Jin, Singapore Institute of Manufacturing Technology (Singapore)
Zhen Feng Wang, Singapore Institute of Manufacturing Technology (Singapore)
Chee Khuen Wong, Singapore Institute for Manufacturing Technology (Singapore)
Y. Murakoshi, National Institute of Advanced Industrial Science and Technology (Japan)
Ryutaro Maeda, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 5650:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Jung-Chih Chiao; David N. Jamieson; Lorenzo Faraone; Andrew S. Dzurak, Editor(s)

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