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Proceedings Paper

Research on sub-macro-offset difference and microparticle geometrical structure affection for atomic force microscope
Author(s): Ruogu Zhu; Yu Huang; Lei Zhu
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Paper Abstract

The measuring error from inherent sub-macro-offset for Atomic Force Microscope (AFM) is first proposed and named as the sub-macro difference in this paper. We give various model suggestions of interchange, bridge, interface and 'Taji' picture (or image) etc. for sub-macro concept. The sub-macro difference mainly includes two categories, such as the static or dynamic difference and the similar or ratio difference that is in scale between macroscopic and microscopic dimension or and the nano dimension. Meanwhile it is also suggested that the concept of measurable limit or critical geometric dimension in fact exists in the interchange area or the interface of the determination and probability shape by means of analyzing those influence of micro-particle geometrical construction based on its quantum behaviors and current macro measuring knowledge and experience. We can further research on the effects of quantum operators on dimension similarly or ratio difference, and the caution of nonlinear measuring error due to transition, symmetry and nonlinear transformation with the help of those suppositions.

Paper Details

Date Published: 9 February 2005
PDF: 12 pages
Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); doi: 10.1117/12.580520
Show Author Affiliations
Ruogu Zhu, China Institute of Metrology (China)
Yu Huang, China Institute of Metrology (China)
Lei Zhu, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 5635:
Nanophotonics, Nanostructure, and Nanometrology
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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