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Proceedings Paper

Effects of high moisture on the purification of clean compressed air
Author(s): Min Guo; Joseph P. Rotter; Allan H. Tram; Russell J. Holmes; Daniel J. Alvarez Jr.
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Paper Abstract

A method was developed to measure hydrocarbons to 1 part-per-trillion (ppt) concentration levels with a gas chromatograph and flame ionization detector (GC/FID). This method was used to measure purifier siloxane removal efficiencies from air under dry and humid conditions. Several media types were examined: activated carbon (AC), bead-shaped activated carbon (BAC) and a proprietary inorganic material (PIM). Under dry conditions, all three materials removed the siloxane challenge to below 1ppt. The AC material had a removal efficiency of 286 ppt under humid conditions. The BAC and PIM removed the siloxane challenge to below 1 ppt under humid conditions. After media saturation was reached under humid conditions, the materials were regenerated and siloxane removal efficiencies were re-examined. Only the PIM material was regenerable to below 1ppt efficiency levels.

Paper Details

Date Published: 27 January 2005
PDF: 4 pages
Proc. SPIE 5645, Advanced Microlithography Technologies, (27 January 2005); doi: 10.1117/12.580509
Show Author Affiliations
Min Guo, Mykrolis Microelectronics Trading Co., Ltd. (China)
Joseph P. Rotter, Mykrolis Corp. (United States)
Allan H. Tram, Mykrolis Corp. (United States)
Russell J. Holmes, Mykrolis Corp. (United States)
Daniel J. Alvarez Jr., Mykrolis Corp. (United States)

Published in SPIE Proceedings Vol. 5645:
Advanced Microlithography Technologies
Yangyuan Wang; Jun-en Yao; Christopher J. Progler, Editor(s)

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