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Proceedings Paper

The performance of micromachined membrane deformable mirror for adaptive optics
Author(s): Ende Li; Haifeng Duan; Yun Dai; Haiying Wang; Kai Chen; Yudong Zhang
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Paper Abstract

The voltage-decoupling model for a 37-channel micromachined membrane deformable mirror is established through theoretically and experimentally analyzing the fitting aberration of a continuous-surface deformable mirror. The function between voltage and displacement of an actuator, the linear superposing among the actuators for micromachined membrane deformable mirror are analyzed by means of the measured influence function of actuators. The fitting of the first 36-order Zernike mode is carried out. The analysis shows that micromachined membrane deformable mirror can be applied to correcting low order aberration. This research provides the basis and guideline for designing the adaptive optical system based on micromachined membrane deformable mirror, thus offers a theoretical basis and reference for the application of the deformable mirror.

Paper Details

Date Published: 23 December 2004
PDF: 7 pages
Proc. SPIE 5639, Adaptive Optics and Applications III, (23 December 2004); doi: 10.1117/12.580424
Show Author Affiliations
Ende Li, Institute of Optics and Electronics, CAS (China)
Haifeng Duan, Institute of Optics and Electronics, CAS (China)
Yun Dai, Institute of Optics and Electronics, CAS (China)
Haiying Wang, Institute of Optics and Electronics, CAS (China)
Kai Chen, Institute of Optics and Electronics, CAS (China)
Yudong Zhang, Institute of Optics and Electronics, CAS (China)


Published in SPIE Proceedings Vol. 5639:
Adaptive Optics and Applications III
Wenhan Jiang; Yoshiji Suzuki, Editor(s)

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