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Proceedings Paper

Comparison using surface evolution theory of the smoothing and figuring of optics by plasma-assisted chemical etching and ion milling
Author(s): Charles B. Zarowin
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Paper Abstract

Plasma assisted chemical etching (PACE) and ion milling (IM), originally developed for microelectronic fabrication, are now finding a new use to shape (figure) and smooth (polish) optical and other surfaces without mechanical contact. Using a recent theory of the temporal evolution of surfaces during arbitrary additive or subtractive processes, the predicted and observed smoothing of PACE and IM are critically compared in this paper to provide insight into their fundamental behavior

Paper Details

Date Published: 26 March 1992
PDF: 6 pages
Proc. SPIE 1618, Large Optics II, (26 March 1992); doi: 10.1117/12.58038
Show Author Affiliations
Charles B. Zarowin, Hughes Danbury Optical Systems, Inc. (United States)


Published in SPIE Proceedings Vol. 1618:
Large Optics II
Robert E. Parks, Editor(s)

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