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Proceedings Paper

Nanotechnology evolution in piezoelectric resonator sensors
Author(s): John A. Kosinski
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Paper Abstract

This paper surveys the ongoing evolution of piezoelectric resonator sensors from the micro-technology to the nano-technology regime. Topics covered include fundamental principles of operation, phenomena used for sensing, types of devices and design considerations, material systems, and fabrication. Particular attention is given to the use of piezoelectric resonators in passive wireless RF sensors.

Paper Details

Date Published: 19 January 2005
PDF: 14 pages
Proc. SPIE 5592, Nanofabrication: Technologies, Devices, and Applications, (19 January 2005); doi: 10.1117/12.580329
Show Author Affiliations
John A. Kosinski, U.S. Army Research, Development and Engineering Command (United States)


Published in SPIE Proceedings Vol. 5592:
Nanofabrication: Technologies, Devices, and Applications
Warren Y-C. Lai; Stanley Pau; O. Daniel Lopez, Editor(s)

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